The SEMI S2 guidelines were created to establish a minimum set of performance-based environmental, health, and safety criteria. As a performance-based guideline, it allows equipment manufacturers to incorporate state-of-the-art technologies not yet addressed by existing standards, provided these technologies deliver equal or superior performance in meeting the requirements.

The guideline has 28 sections, 5 appendices, and 18 sections containing related information.

We can evaluate and test your equipment to all the applicable requirements and issue a comprehensive report which is key to the acceptance of your equipment. Our evaluation reports document the results of the hazard analysis and safety evaluation, as well as the conformance or non-conformance of the system to the SEMI guidelines to ensure acceptance and fast qualification of compliant requirements.